http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101294452-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K30-88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K3-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K2201-016 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-02 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K3-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3121 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02208 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K3-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-04 |
| filingDate | 2010-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101294452-B1 |
| titleOfInvention | Polysiloxane condensation reactants |
| abstract | The present invention provides a particularly preferred condensation reactant solution for embedding in a narrow, high aspect trench formed in a substrate, having a long pot life, good embedding in a trench when used for trench filling, and firing to form silicon oxide. A condensation reactant solution having a low curing shrinkage ratio and excellent crack resistance and HF resistance is provided. In the present invention, (I) (i) the following general formula (1): R 1 n SiX 1 4- n (1) {wherein n is an integer of 0 to 3, and R 1 is a hydrogen atom or C 1-10 Is a hydrocarbon group, X 1 is a halogen atom, an alkoxy group having 1 to 6 carbon atoms or an acetoxy group} 40 mass% or more and 99 mass% or less of the condensation conversion amount of the polysiloxane compound derived from the silane compound represented by (ii) Condensation reaction material obtained by condensation reaction of the condensation component containing at least 1 mass% and 60 mass% or less of silica particle, and (II) solvent are contained, The silane compound represented by General formula (1) is a general formula (1) Provided is a condensation reactant solution which is at least two kinds of silane compounds containing at least a tetrafunctional silane compound having 0 and a trifunctional silane compound having n is 1 in General Formula (1). |
| priorityDate | 2009-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 168.