| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2375-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2101-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-0895
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L101-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-4238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-4854
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-6674
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-664
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G18-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J9-122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L75-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G18-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L75-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L101-12 |
| filingDate |
2006-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2013-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101290490-B1 |
| titleOfInvention |
Polymer materials, foams obtained therefrom and polishing pads using the same |
| abstract |
An object of the present invention is to provide a polymer material useful for polishing pads that can achieve improved flatness and flattening efficiency of the to-be-polished surface and less scratches. The said subject is solved by the polymer material whose tensile elasticity modulus in 130 degreeC is 800-800 Mpa, 50 degreeC, and the loss tangent is 0.2 or less, and the contact angle with water is 80 degrees or less after 50 degreeC saturated swelling with water. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210054388-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102298114-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11400559-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102287923-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210051264-A |
| priorityDate |
2005-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |