http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101282867-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_65b758ae69cd0ab5108fc4b4199a5e89 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2012-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a2dfca61a02588eb9deb94490d97ba4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ad63821262798cdf2dfcf9a11b23ef6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_971bf861092616e0c1cd2be5013cb829 |
| publicationDate | 2013-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101282867-B1 |
| titleOfInvention | Hybrid Radical Plasma Graphene Etching Equipment |
| abstract | The present invention relates to a hybrid radical plasma graphene etching apparatus capable of etching graphene using an atmospheric plasma while moving the graphene-coated polymer material in a stage conveying method. A hybrid radical plasma graphene etching apparatus having a driving unit to move according to the above, the hybrid radical plasma graphene etching apparatus comprising: an atmospheric pressure plasma electrode for generating and radiating a neutral radical plasma when a plasma power source is applied; And a graphene-coated polymer substrate on which a mask is placed, and an etching portion for etching the graphene of the polymer substrate in the pattern of the mask by the emitted atmospheric radical plasma positioned under the atmospheric plasma electrode. The etching unit includes a main body in which a vacuum suction hole is formed, and a conductive stage coupled to an upper part of the main body, on which the graphene-coated polymer substrate is seated, and forming a multi-slit structure. It is done. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106624371-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106624371-B |
| priorityDate | 2012-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.