http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101234129-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2005-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101234129-B1 |
| titleOfInvention | Positive Resist Composition and Pattern Forming Method Using The Same |
| abstract | Resin which contains the repeating unit containing a specific norbornane lactone structure, and the repeating unit containing a specific alicyclic hydrocarbon structure, and which the solubility in alkaline developing solution increases by the action of an acid; And a compound that generates an acid upon treatment with one of actinic light and radiation, and a pattern forming method using the same. |
| priorityDate | 2004-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 196.