http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101000373-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2003-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101000373-B1 |
| titleOfInvention | Positive resist composition |
| abstract | (Problem) To provide a positive resist composition which solves the problems in the technique for improving the original performance of the micro-light processing process using ultraviolet light, in particular ArF excimer laser light, more specifically mask coverage In addition to reducing dependence, development defects (especially bridging) are alleviated, and various performances such as PEB temperature dependence, exposure margin, time stability after application (PCD), time stability after exposure (PED), and process margin are excellent. A positive resist composition is provided.n n n (Solution) A compound which generates an acid by irradiation with a resin, active light or radiation, in which the dissolution rate in an alkali developer is increased by the action of an acid, containing a repeating unit derived from isosorbide (meth) acrylate. Positive resist composition containing a. |
| priorityDate | 2002-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 275.