http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100980511-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02T50-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F05D2260-607 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04D19-042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04D29-701 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2008-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100980511-B1 |
| titleOfInvention | Turbo Molecular Pump, Substrate Processing Apparatus, and Method of Suppressing Sediment Attachment in Turbo Molecular Pump |
| abstract | The present invention provides a turbomolecular pump that can reliably suppress the deposition of deposits on components.n n n The turbomolecular pump 18 which discharges the deposit adhesion factor gas from the chamber 11 includes a rotor 37 having a rotating shaft 36 along the exhaust flow, a case 38 accommodating the rotor 37, and A plurality of rotary blades 39 projecting perpendicularly from the rotor 37 with respect to the rotary shaft 36, and a plurality of stop blades 40 projecting vertically from the case 38 with respect to the rotary shaft 36, The plurality of rotary blades 39 are divided into a plurality of rotary wing groups 41, and the plurality of stop blades 40 are divided into a plurality of stop blade groups 42, and each of the rotary wing groups 41 and each The stationary wing group 42 is alternately arranged along the rotation axis 36, and the gas supply port 43 opening upstream from the rotary wing group 41 positioned on the most downstream side with respect to the exhaust flow contains argon molecules. The deposit deposition suppression gas is supplied. |
| priorityDate | 2007-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.