http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100976882-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2008-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100976882-B1 |
| titleOfInvention | Method for manufacturing semiconductor device and storage medium |
| abstract | An object of the present invention is to obtain a good etching shape in etching an organic film formed on a substrate. n In the present invention, the silicon-containing film is etched by plasma to transfer the pattern of the pattern mask on the film, the step of removing the pattern mask to expose the surface of the silicon-containing film, and active species of oxygen in the plasma. Etching the surface of the organic film through the pattern of the silicon-containing film to form a recess, thereafter sputtering the silicon-containing film to form a protective film made of a silicon-containing material on the inner wall surface of the recess, and By performing the step of further etching in the depth direction through the pattern of the silicon-containing film by the active species of oxygen in the plasma, etching can be performed while protecting the sidewall of the concave portion from the active species of oxygen, thereby obtaining a good pattern shape. |
| priorityDate | 2007-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.