| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01Q21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32128
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01Q7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01Q7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01Q21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2002-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2009-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100932019-B1 |
| titleOfInvention |
Plasma generating device and method, and high frequency drive circuit |
| abstract |
An RF driver circuit and quadrature antenna assembly / configuration is disclosed as part of a method and system for generating a high density plasma. Antenna assembly 105, 115, 110, 120 is an orthogonal antenna system that can be driven by any RF generator / circuit 125, 130 with proper impedance matching to exhibit low impedance. The disclosed RF driver circuit uses a switched amplifier element and exhibits low output impedance. The disclosed low output impedance RF driver circuit eliminates the need for a matching circuit to interface to the inherent impedance variations associated with the plasma. Also disclosed is the selection of capacitance or inductance values for adjusting the RF plasma source. |
| priorityDate |
2001-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |