http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100898531-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-265 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-083 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2001-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2009-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2009-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100898531-B1 |
| titleOfInvention | Zirconia reinforced ceramic parts and coatings in semiconductor process equipment and manufacturing method thereof |
| abstract | The corrosion-resistant part of a semiconductor process facility, such as a plasma chamber, comprises a zirconia-reinforced ceramic material as the outermost surface of the part. The part may be entirely a ceramic material and the ceramic material may be provided as a coating on a substrate such as aluminum or aluminum alloy, stainless steel or refractory metal. The zirconia reinforced ceramic may be a zirconia-reinforced ceramic such as a tetragonal zirconia polycrystalline (TZP) material, partially-stabilized zirconia (PSZ) or zirconia reinforced alumina (tetragonal zirconia particles dispersed in Al 2 O 3 ) Gt; (ZTC) < / RTI > In the case of a ceramic zirconia reinforced coating, one or more intermediate layers may be provided between the component and the ceramic coating. In order to improve the adhesion of the ceramic coating, the surface of the part or the surface of the intermediate layer may be surface roughened before the ceramic coating is deposited. |
| priorityDate | 2000-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.