| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76838
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00595
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7681 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2002-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2009-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100883291-B1 |
| titleOfInvention |
Organic Anti-Reflection Plasma Etching Method |
| abstract |
Semiconductor fabrication process for etching organic antireflective films using O 2 -free sulfur containing gas which minimizes the lateral etch rate of the top photoresist to provide selectivity to the bottom film and / or to maintain the critical dimensions defined by the photoresist Initiate. The etching gas may include SO 2 , a carrier gas such as Ar or He, and other optional gas such as HBr. This process is useful for etching contacts or via openings of 0.25 microns or less in forming structures such as damascene structures.n n n n Organic antireflection film, etching gas, damascene structure |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10529790-B2 |
| priorityDate |
2001-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |