http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100863984-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-108 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-115 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
filingDate | 2002-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2008-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2008-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-100863984-B1 |
titleOfInvention | Positive resist composition |
abstract | (A) a repeating unit (1) having a specific structure, a repeating unit (2) having a function of being decomposed by the action of an acid to increase the solubility of the resin in an alkaline developer, and an alkali-soluble group It contains a repeating unit (3) that does not have, and contains a resin that is decomposed by the action of acid to increase the solubility in the alkaline developer, and (B) a compound that generates an acid by irradiation with actinic light or radiation Positive resist composition made into. |
priorityDate | 2001-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 416.