http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100852540-B1

Outgoing Links

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
filingDate 2005-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2008-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2008-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-100852540-B1
titleOfInvention Energy Harvesting Molecules and Photoresist Technology
abstract First portion; And another second portion capable of harvesting energy from an external source, wherein the second portion is positioned such that energy harvested from the second portion can be delivered to the first portion. A film comprising a first portion and a second portion capable of harvesting energy from an external source, the film comprising a film derived in response to energy transfer, the second portion being the first portion and the second portion An article positioned to have an electron capture cross section larger than an electron capture cross section of only one portion. Forming a film on the substrate, the film comprising a first portion and another second portion; Exposing the film to photon or charged particle radiation; And patterning the film.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220162566-A
priorityDate 2004-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 30.