http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100798648-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-3563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-1293 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B23-024 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-359 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05B23-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 2000-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2008-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100798648-B1 |
| titleOfInvention | Process monitoring method and apparatus using principal component analysis |
| abstract | A process monitoring method and apparatus using principal component analysis are provided. Correlated attributes are measured for the process to be monitored (manufacturing process). Principal component analysis is then performed on the measured correlation properties to generate one or more manufacturing principal components. The one or more manufacturing principal components are compared to the principal component (calibration principal component) associated with the calibration process. The calibration principal component is obtained by measuring the correlation characteristics of the calibration process and performing principal component analysis on the measured correlation characteristics to generate one or more principal components. Principal components having characteristics indicative of one or more of a given process situation, process event, and chamber condition are identified and designated as calibration principal components. Preferably, the one or more preparation principal ingredients are compared to the calibration principal ingredients by calculating the inner product of the calibration and preparation principal ingredients. |
| priorityDate | 1999-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.