http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100723088-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3125 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3127 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66583 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate | 2005-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100723088-B1 |
| titleOfInvention | Method for manufacturing semiconductor device |
| abstract | A mask material forming step of forming a mask material on a substrate; a concave part forming step of patterning the mask material in a predetermined shape to form a concave part in the mask material; a positioning step of arranging a functional liquid in the concave part; A step of drying the functional liquid disposed in the concave portion; an annealing (baking) of a functional film formed by the drying step; and a step of removing the mask material to form a dummy gate pattern made of the constituent material of the functional liquid And a pattern forming step of forming a pattern. |
| priorityDate | 2004-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.