http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100689698-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K2103-172 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K26-18 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2005-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100689698-B1 |
| titleOfInvention | Object processing method with passivation layer formed |
| abstract | The present invention provides a method for processing an object on which a passivation layer is formed that can effectively remove the passivation layer and improve the reliability of the object.n n n The object processing method of the present invention is to move the object into the processing chamber and to move in the processing direction, by irradiating a laser beam to the processing site of the object in the state containing the inert material, the reaction of the laser beam and the inert material Generating a plasma at the processing site on the passivation layer, causing the passivation layer to be removed by the plasma, and processing the silicon substrate by a laser beam.n n n According to the present invention, the passivation layer can be efficiently removed without changing the optical apparatus or the laser source for processing the object.n n n n Passivation Layer, Plasma, UV Laser |
| priorityDate | 2005-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.