http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100603682-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 |
| filingDate | 2001-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100603682-B1 |
| titleOfInvention | Wafer Area Pressure Control Apparatus and Method for Plasma Confinement |
| abstract | A plasma process chamber is provided that improves wafer area pressure control. The plasma process chamber is a vacuum chamber with devices connected to generate and maintain plasma. Part of this apparatus is an etch gas source and an exhaust port. Confined rings form the region on the wafer. Wafer region pressure depends on the pressure drop between confined rings. The confinement rings are part of the wafer region pressure control device that provides wafer region pressure control of greater than 100%. This wafer region pressure control device may be three movable confinement rings and one confinement block placed on a holder, which may be used to provide the desired wafer region pressure control. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150008819-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102283688-B1 |
| priorityDate | 2000-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466138900 |
Total number of triples: 21.