http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100566356-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32211 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 2002-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100566356-B1 |
| titleOfInvention | Plasma Apparatus and Manufacturing Method Thereof |
| abstract | The plasma apparatus includes a container 11 having an opening, a dielectric member 13 supported on an end surface of the outer periphery of the opening of the container 11 to close the opening, and through the dielectric member 13 of the container 11. Electromagnetic field supply means for supplying an electromagnetic field therein, and a shield material 12 for covering the outer circumference of the dielectric member 13 to shield the electromagnetic field. The distance L 1 from the inner surface of the container 11 to the inner surface of the shield material 12 on the end surface of the container 11 is connected to the end surface of the container 11, the electromagnetic field supply means, and the shield material 12. It is approximately N / 2 times (N is an integer of 1 or more) of the wavelength of the electromagnetic field in the area | region 18 enclosed by it. |
| priorityDate | 2001-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.