| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-907
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-13454 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66765
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78621
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78624
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1362 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| filingDate |
1998-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2006-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2006-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100543102-B1 |
| titleOfInvention |
Semiconductor device and its manufacturing method |
| abstract |
According to the present invention, each of the source / drain regions has a first conductive layer (n + layer), a second conductive layer (n− layer) having a higher resistance than the first conductive layer, and an intrinsic or substantially intrinsic semiconductor layer (i layer). The lower gate type semiconductor device including the crystalline semiconductor layers having a laminated structure consisting of). Here, the n- layer serves as an LDD region, and the i layer serves as a planar offset region. Semiconductor devices are manufactured by a simple process that is reliable, excellent in reproducibility, and suitable for mass production. |
| priorityDate |
1997-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |