http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100347737-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E05B1-0092 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E05B5-003 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-013 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2001-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2002-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2002-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100347737-B1 |
| titleOfInvention | Apparatus and method for detecting a substance |
| abstract | When the target membrane is removed by a process that selectively produces a chemical reaction product (eg, ammonia when polishing a wafer with nitride film in a KOH-containing slurry) with one of the stop membrane and the target membrane, and the target membrane is removed By monitoring the level of the chemical reaction product, the end point of removal of the target membrane over the stop membrane is detected. In addition, by extracting a substance present as a gas from the liquid and monitoring the gas to detect the substance, a very low concentration of substance in the liquid is detected. |
| priorityDate | 1998-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.