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filingDate 1997-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2002-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2002-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-100323326-B1
titleOfInvention Non-corrosive cleaning composition for removing plasma etching residues
abstract The present invention is water (A); At least one compound (B) selected from hydroxylammonium compounds and at least one basic compound (C), and optionally a chelating stabilizer (D) and optionally a surfactant (E), having a pH of 2-6, A non-corrosive cleaning composition for removing plasma etch residues.
priorityDate 1996-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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