| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3218
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-264
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
1997-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2002-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100322392-B1 |
| titleOfInvention |
Cleaning agent |
| abstract |
The present invention relates to a cleaning agent composed of an organic acid having at least one carboxyl group and a complexing agent having a chelating ability. The use of the cleaning agent of the present invention does not adversely affect the corrosion of metallized wiring and the flatness on the surface of a semiconductor substrate. It can effectively remove particle and metallic contaminants. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100532380-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9845444-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100606187-B1 |
| priorityDate |
1996-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |