Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0388 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-028 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L1-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D133-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D101-08 |
filingDate |
1997-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2001-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2001-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-100278257-B1 |
titleOfInvention |
High resolution positive acting dry film photoresist |
abstract |
The present invention relates to an embossed photoresist composition (eg, a single layer dry film) that can be peeled off in an aqueous alkali solution. The composition of the present invention comprises a UV transparent resin binder system capable of effectively photobleaching optical acid generators and photoactive components. The acid functional cellulose resin is a single binder resin, and acidic acrylate resins can optionally be used. Dry coatings can be used as etching and plating resists. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101142631-B1 |
priorityDate |
1996-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |