http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2020129476-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F12-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F28-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2019-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2020129476-A1 |
| titleOfInvention | Actinic light-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and manufacturing method of electronic device |
| abstract | Excellent sensitivity and EL when forming ultrafine patterns (for example, line and space patterns with a line width of 45 nm or hole patterns with a hole size of 45 nm or less), small LWR and LER, and excellent photosensitivity or CDU. Provided are a radiation-sensitive resin composition, a resist film using the above composition, a pattern forming method, and a method for producing an electronic device. The actinic light-sensitive or radiation-sensitive resin composition contains a resin having a repeating unit represented by the general formula (P1) in an amount of 30% by mass or more based on the total solid content, and a cross-linking agent is added to the total solid content. On the other hand, it contains 10% by mass or less. As the resist film, the pattern forming method, and the method for manufacturing the electronic device, the above-mentioned sensitive light-sensitive or radiation-sensitive resin composition is used. |
| priorityDate | 2018-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 215.