abstract |
A ceramic tube containing yttrium oxide as the main component, with a cutting level at a load length rate of 25% on the inner peripheral surface roughness curve and a cutting level at a load length rate of 75% on the roughness curve. The cutting level difference (Rδc) in the roughness curve representing the difference is 2 μm or less, and the coefficient of variation of the cutting level difference (Rδc) is 0.05 to 0.6. |