http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2019124452-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 |
| filingDate | 2018-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2019124452-A1 |
| titleOfInvention | Photosensitive resin laminate |
| abstract | Provided is a photosensitive resin laminate which avoids generation of resist protrusions, gives a good resist pattern shape, and is obtained with good productivity. In one aspect, a photosensitive resin laminate comprising a support film and a photosensitive resin composition layer formed on the support film, wherein the support film contains fine particles, and the support film is an epi-illumination type. Provided is a photosensitive resin laminate, which includes a region having a total area ratio of optical abnormal regions of 300 ppm or less when observed with a laser microscope at an area of 13.5 mm 2 . |
| priorityDate | 2017-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 218.