| abstract |
It contains indium element (In), tin element (Sn), zinc element (Zn), X element, and oxygen, and the atomic ratio of each element satisfies the following formula (1), and is further represented by Zn 2 SnO 4. A sputtering target comprising an oxide sintered body containing a spinel structural compound. 0.001 ≤ X / (In + Sn + Zn + X) ≤ 0.05 ... (1) (In formula (1), In, Zn, Sn and X represent the contents of indium element, zinc element, tin element and X element in the oxide sintered body, respectively. The X element is Ge, Si and Y. , Zr, Al, Mg, Yb, and Ga.) |