Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D153-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F297-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2012 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L25-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L53-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L53-02 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L53-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F297-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L25-04 |
filingDate |
2017-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2019-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-WO2018008481-A1 |
titleOfInvention |
Composition for pattern formation and pattern formation method |
abstract |
The present invention provides a first polymer comprising a first block comprising a first structural unit derived from substituted or unsubstituted styrene and a second block comprising a second structural unit other than the first structural unit, and It is a composition for pattern formation containing a solvent and a second polymer having a structural unit and having a group containing a polar group bonded to at least one end of the main chain, and a solvent. The polar group is preferably a hydroxy group or a carboxyl group. The number average molecular weight of the second polymer is preferably 6,000 or less. The mass ratio of the second polymer to the first polymer is preferably 0.15 or more and 0.4 or less. The solvent preferably contains a first compound having a hydroxyl group and an alkyl ester group. |
priorityDate |
2016-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |