http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017170624-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29L2031-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29L2011-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-161 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-026 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-40 |
| filingDate | 2017-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2017170624-A1 |
| titleOfInvention | Pattern formation method, processed substrate manufacturing method, optical component manufacturing method, circuit board manufacturing method, electronic component manufacturing method, imprint mold manufacturing method |
| abstract | A layer of a curable composition (A1) containing a component (a1) that is a polymerizable compound and a component (c1) that is a surfactant is laminated on the surface of the substrate, and the layer of the curable composition (A1) In addition, droplets of the curable composition (A2) including at least the component (a2) which is a polymerizable compound and the component (c2) which is a surfactant are discretely dropped to form a pattern between the mold having the pattern and the substrate. Sandwiching the mixed layer of the curable composition (A1) and the curable composition (A2), curing the mixed layer by irradiating light, and separating the mold from the cured mixed layer. To form a pattern on the substrate. The curable composition (A1) contains at least 0.5% by weight or more of the component (c1) as the surfactant, and the curable composition (A2) contains the component (c2) as the surfactant. It contains at least 0.5% by weight or more. |
| priorityDate | 2016-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 180.