http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017122600-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-63 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-65 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L79-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2017-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2017122600-A1 |
| titleOfInvention | Liquid composition for imparting alcohol repellency to semiconductor substrate material and surface treatment method of semiconductor substrate using the liquid composition |
| abstract | The present invention relates to a liquid composition for imparting alcohol repellency to a semiconductor substrate material, wherein the substitution is represented by the formula (1): wherein n is an integer of 3 or more and 20 or less. A compound (B) having 0.01 to 15% by mass of a surfactant having a group and an anionic hydrophilic group, a weight average molecular weight of 200 to 500,000 and having an amino group of 4 mmol to 30 mmol per gram And polyethyleneimine, and formula (2) or (3): ## STR2 ## wherein R1 and R2 are each independently hydrogen or an alkyl group having 1 to 6 carbon atoms, an alkenyl group, an alkynyl group, or An aryl group.) Wherein R3 and R4 are each independently hydrogen or an alkyl, alkenyl, alkynyl or aryl group having 1 to 6 carbon atoms. Yes, X- is fluoride ion, chloride ion, bromide ion, iodide ion, fluoroborate ion, phosphate ion, acetate ion, trifluoroacetate ion, sulfate ion, hydrogen sulfate ion, methane sulfate ion, hydroxide A liquid composition comprising 0.0001 to 20% by mass of a compound (B) selected from the group consisting of compounds having a substituent represented by: Ion, perchlorate ion or nitrate ion) A surface treatment method for a semiconductor substrate is provided. |
| priorityDate | 2016-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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