abstract |
The ceramic substrate of the present disclosure includes alumina crystals and zirconia crystals, and the mass ratio of the mass A of alumina to the mass B containing the stabilizer components, hafnia and zirconia is 89:11 to 93: 7. The average crystal grain size of the alumina is 1.0 μm or more and 1.5 μm or less, and the average crystal grain size of the zirconia is 0.3 μm or more and 0.5 μm or less. [Selection] Figure 1 |