http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2016052408-A1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
filingDate | 2015-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2017-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-WO2016052408-A1 |
titleOfInvention | Polishing composition |
abstract | INDUSTRIAL APPLICABILITY The present invention is suitable for polishing an object to be polished having a layer containing a high mobility material having a higher carrier mobility than Si, suppressing excessive dissolution of the layer containing a high mobility material, and efficient. A polishing composition capable of smooth polishing is provided. The present invention is a polishing composition for use in polishing an object to be polished having a layer containing a high mobility material having a higher carrier mobility than Si, comprising abrasive grains, and a monovalent acid. At least one salt compound selected from the group consisting of a salt, a divalent acid salt, a trivalent acid salt, and a halide salt, having an electrical conductivity of 1 mS / cm or more, It is polishing composition whose content of hydrogen oxide is less than 0.1 mass%. |
priorityDate | 2014-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 464.