| abstract |
Conventionally, the membrane of a solid-state nanopore device, which is considered promising for grasping structural features of DNA and base sequence analysis, is thick, and the accuracy of determining the base sequence in the DNA strand has been insufficient. A first film is formed on a first substrate whose surface is Si, and then a hole is formed in the first film so that the surface of the first substrate is exposed, and then a second film is formed. A film is formed on the first film as well as on the surface of the first substrate, and then the first substrate is etched with a solution that cannot remove the second film, thereby forming a membrane. how to. |