http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015122425-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N31-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32917 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32972 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01D7-005 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2015-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2015122425-A1 |
| titleOfInvention | Plasma processing detection indicator |
| abstract | The present invention is a plasma processing detection indicator using a fibrous base material or a synthetic resin base material containing a color pigment as a base material, and fine fiber pieces and color pigments are blown from the base material during the plasma processing. A plasma processing detection indicator that is prevented from being generated is provided. Specifically, the present invention is a plasma processing detection indicator in which at least a discoloration layer that changes color in a plasma processing atmosphere is laminated on a part or all of the surface of a substrate, (1) The base material is a fibrous base material or a synthetic resin base material containing a color pigment, (2) Provide an indicator characterized by having a resin-based or inorganic-based transparent coating layer that covers the entire surface of the substrate between the substrate and the discoloration layer. |
| priorityDate | 2014-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 198.