http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2013176168-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24413 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C24-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76826 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76825 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-10 |
| filingDate | 2013-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2013176168-A1 |
| titleOfInvention | Parts for plasma processing apparatus and method for manufacturing parts for plasma processing apparatus |
| abstract | A component for a plasma processing apparatus, comprising: a base material; a base layer that covers the surface of the base material; and an yttrium oxide coating that covers the surface of the base layer, wherein the base layer has a thermal conductivity of 35 W / The yttrium oxide film is composed of a metal oxide film of m · K or less, and the yttrium oxide film includes at least a particulate part made of yttrium oxide in which a grain boundary is observed and a non-particulate part made of yttrium oxide in which the grain boundary is not observed. The yttrium oxide film has a film thickness of 10 μm or more, a film density of 96% or more, and an area ratio of the particulate portion in the observation range of 20 μm × 20 μm on the surface of the yttrium oxide film. 0 to 20%, and the area ratio of the non-particulate portion in the observation range is 80 to 100%. |
| priorityDate | 2012-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.