http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2011021555-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0752 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G59-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2010-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2011021555-A1 |
| titleOfInvention | Lithographic resist underlayer film forming composition comprising a resin containing an aliphatic ring and an aromatic ring |
| abstract | A resist underlayer film having both heat resistance and etching resistance is provided. A composition for forming a resist underlayer film for lithography, comprising a reaction product (C) of an alicyclic epoxy polymer (A), a condensed cyclic aromatic carboxylic acid and a monocyclic aromatic carboxylic acid (B). object. The alicyclic epoxy polymer (A) is represented by the following formula (1): [Chemical 1] (T represents a repeating unit structure having an aliphatic ring in the main chain of the polymer, and E represents an epoxy group or an organic group having an epoxy group). In addition, the condensed cyclic aromatic carboxylic acid and the monocyclic aromatic carboxylic acid (B) are a molar ratio of the condensed cyclic aromatic carboxylic acid (B1) and the monocyclic aromatic carboxylic acid (B2). B1: B2 = 3: 7 to 7: 3. Furthermore, the condensed cyclic aromatic carboxylic acid (B1) is 9-anthracenecarboxylic acid, and the monocyclic aromatic carboxylic acid (B2) is benzoic acid. [Selection figure] None |
| priorityDate | 2009-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 338.