http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2009066768-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L79-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2650-48 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G65-007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D171-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0276 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate | 2008-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2009066768-A1 |
| titleOfInvention | Composition for surface antireflection film and pattern forming method |
| abstract | It has good applicability to various resist materials, and can form a good surface antireflection film without problems of PED, standing wave effect, and multiple reflection effect with a smaller amount of dripping. The composition for a surface antireflection film that does not cause coating defects is as follows: (A) a fluorine-containing compound represented by the following general formula (I), (B) an amino alcohol, a hydrocarbon group-containing amine, an aromatic It consists of at least one selected from amines, ammonium hydroxides, polyalkyleneamines, nitrogen-containing heterocyclic compounds and amine derivatives having a hydroxyl group thereof, and (C) a water-soluble polymer. A predetermined amount of the composition for surface antireflection film is dropped on various photoresist films such as a chemically amplified resist film and applied by spin coating or the like to form a surface antireflection film. (In the formula, Rf is a linear or branched chain, part or all of which represents an alkyl group substituted with fluorine, and m represents an integer of 0 to 10.) |
| priorityDate | 2007-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 83.