http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2009028511-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0752 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-60 |
| filingDate | 2008-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2010-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2009028511-A1 |
| titleOfInvention | Lithographic resist underlayer film forming composition and method for manufacturing semiconductor device |
| abstract | 【Task】 An object of the present invention is to obtain a resist underlayer film forming composition that can be applied uniformly and suppresses the generation of sublimates during thermosetting. It is another object of the present invention to obtain a composition for forming a resist underlayer film having a high dry etching selectivity to an upper layer resist. [Solution] Following formula (1) [Chemical 1] [Where R 1 and R 2 are independently of each other —X—Y [wherein X is an oxygen atom, an alkylene group having 1 to 18 carbon atoms, or —OC n H 2n — (wherein n is 1 to Represents an integer of 18.), and Y represents a lactone ring or an adamantane ring. Or a group represented by the formula: One of R 1 and R 2 represents the group represented by —X—Y, and the other represents an aryl group, a methyl group, an ethyl group, or a cyclic alkyl group having 3 to 6 carbon atoms. A composition for forming a resist underlayer film for lithography comprising a polysilane compound having a unit structure represented by formula (II) and an organic solvent. [Selection figure] None |
| priorityDate | 2007-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 112.