http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2005110679-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2005-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2005110679-A1 |
| titleOfInvention | Polishing composition |
| abstract | 【Task】 Provided is a polishing agent used in planarization polishing in a semiconductor device manufacturing process and an element separation process of a semiconductor device. SOLUTION: A water-soluble organic compound (A) component containing a carboxyl group or a salt thereof and a cerium oxide powder fired by holding the cerium compound in at least two different firing temperature ranges [measured by laser diffraction method] It was obtained by wet pulverization until the ratio of average particle diameter (b1)] / [particle diameter converted from specific surface area by gas adsorption method (b2)] was in the range of 1 to 4 and 15 to 40 A polishing composition comprising an aqueous sol (B) component of cerium oxide particles. (A) A component is ammonium acrylate, ammonium methacrylate, an amino acid, and an amino acid derivative. The component (B) is obtained by wet-grinding a cerium oxide powder obtained by a firing process having a firing temperature range of 200 to 350 ° C. and 400 to 550 ° C. or 700 to 850 ° C. with a cerium compound. . [Selection] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5897200-B2 |
| priorityDate | 2004-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 172.