| abstract |
PURPOSE: To obtain a silica-based coating excellent in mechanical strength, chemical-resistant feature, and humidity-withstanding capability, and free of pinholes or cracks, by a method wherein a silica-based coating is irradiated with ultraviolet rays in an ozone-containing atmosphere. n CONSTITUTION: A silica-based coating 10 is irradiated with ultraviolet rays in an ozone-containing atmosphere. For example, a silica-based coating liquid containing a hydrolytic product of alcoxy silane is applied by spinning onto a silicon wafer W, the silicon wafer W is allowed to dry at 140°C, is installed on a stage 8 of a ultraviolet ray processing unit, and is heated to 200°C. The stage 8 is then caused to go up for the closure of a processing chamber 3. A gas containing 10 weight % of ozone is introduced into the processing chamber 3 from an externally positioned ozone generator through a gas inlet port 6. The silica-based coating 10 is then irradiated with 253.7nm-long ultraviolet waves supplied by an ultraviolet lamp 4, which continues for 30 minutes. Next, the silicon wafer W is heated at 400°C in nitrogen gas for 30 minutes. n COPYRIGHT: (C)1988,JPO&Japio |