http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S632323-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 1986-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d46a09ab400c60eb400a429f3fb658bf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5966849fe889359110c1c260a445134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e8bdf843ac937c0b43ce00b64c8124d |
| publicationDate | 1988-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S632323-A |
| titleOfInvention | Apparatus for plasma processing |
| abstract | PURPOSE: To efficiently proceed the reaction of quasi-stable excited species with process gas by introducing process gas generated by heating liquid or solid reactive substance at room temperature without using carrier gas into a reaction chamber in which substrates to be processed are mounted. n CONSTITUTION: Reactive substances, such as liquid CCl 4 , WF 6 , etc. and solid C 2 F 2 Cl 4 are stored in a gas storage unit 6 with heater. The substances are evaporated by heating with the heater to form processing gas. The gas is fed through a mass flow controller 7 to a reaction chamber 1. A CVD film is formed on a substrate 2 to be processed by the reactive product of quasi-stable excited species with the processing gas in the chamber 1 or the substrate is etched. Accordingly, since it is not necessary to use carrier gas, quasi-stable excited species is not inactivated due to the reaction with the carrier gas. n COPYRIGHT: (C)1988,JPO&Japio |
| priorityDate | 1986-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527288 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5943 |
Total number of triples: 16.