| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
1998-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64c140bde165dc8298fe42ba69ad5dd6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66d320b37df59e2ff486ac7b963c85df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe5ea923691ddf51f74b34b3731ef63b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63bb077ddf389cebeed99e0bb1f7bd22 |
| publicationDate |
1999-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H1174255-A |
| titleOfInvention |
Glass-like carbon electrode plate for plasma etching |
| abstract |
(57) [Problem] To maintain high adhesion between a plasma etching electrode plate and a back plate even when plasma is consumed, and to maintain uniform etching rates at the outer peripheral portion and the central portion of the electrode plate. The present invention provides a possible electrode plate for plasma etching. SOLUTION: A plasma etching electrode plate made of glassy carbon in which a plasma etching electrode plate itself is applied with a compressive stress warping convexly to a mounting surface side as consumed by plasma. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020057696-A |
| priorityDate |
1997-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |