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filingDate 1998-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2da2c857a41e723f7ba1eb44a4e54535
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publicationDate 1999-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H11297672-A
titleOfInvention Shower plate, shower plate peripheral structure and process equipment
abstract (57) [Summary] [PROBLEMS] To provide a shower plate in which an outlet can be easily formed regardless of a material. Provided is a shower plate capable of preventing plasma from being ignited in a gap between a shower plate and a gap plate placed thereon when used in a microwave excitation plasma apparatus. SOLUTION: An outlet 207 is formed by a space formed between a hole formed in a plate 202 and a column 204 having a smaller diameter than the hole inserted in the hole. .
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Total number of triples: 54.