abstract |
(57) [Summary] [PROBLEMS] To provide a shower plate in which an outlet can be easily formed regardless of a material. Provided is a shower plate capable of preventing plasma from being ignited in a gap between a shower plate and a gap plate placed thereon when used in a microwave excitation plasma apparatus. SOLUTION: An outlet 207 is formed by a space formed between a hole formed in a plate 202 and a column 204 having a smaller diameter than the hole inserted in the hole. . |