http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11218515-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_98bbc186b0291ed5603de229258a7a95 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-416 |
filingDate | 1998-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2570f02496f9ddef332350287463c94b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3eb77d7cc49391ea825ce501b59855ea http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e33b6223a2ade4138fe1d1a38ff82ea1 |
publicationDate | 1999-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-H11218515-A |
titleOfInvention | Silicon sensor and optical scanning type two-dimensional concentration distribution measuring device using the same |
abstract | [PROBLEMS] To provide a highly sensitive silicon sensor and an optical scanning type two-dimensional concentration distribution measuring device using the same. SOLUTION: A sensor surface 6 is provided on one surface of a silicon substrate 5. And a transparent film 7 having an anti-reflection function on the other surface. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0204935-A1 |
priorityDate | 1998-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.