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filingDate 1997-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfb78eecad74642e99ad600bfdf8c71a
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publicationDate 1999-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H11105185-A
titleOfInvention Low dielectric constant siliceous film
abstract PROBLEM TO BE SOLVED: To provide a siliceous film having a small relative dielectric constant, and to provide a semiconductor device and a coating composition containing the siliceous film. A low dielectric constant siliceous film formed by heating and firing an aluminum-containing polysilazane film. A semiconductor device comprising the siliceous film as an interlayer insulating film. A coating composition comprising an organic solvent solution containing aluminum-containing polysilazane.
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