| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_40dd791eb9a6d730b2a4e8b9c8aa9b54 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P20-10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02323
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D133-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-16 |
| filingDate |
2000-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32797666da5bab25cd4f5e5e4014cbbc |
| publicationDate |
2002-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002075982-A |
| titleOfInvention |
Low dielectric constant porous siliceous film, semiconductor device and coating composition |
| abstract |
PROBLEM TO BE SOLVED: To provide an interlayer insulating film stably exhibiting a low dielectric constant, and having both mechanical strength and various chemical resistances that can withstand the latest high integration process such as a CMP method. To provide a suitable porous siliceous membrane. SOLUTION: The relative dielectric constant obtained by firing a film of a composition containing a polyalkylsilazane and a polyacrylate or a polymethacrylate is 2. A porous siliceous membrane characterized by being less than 5. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7754003-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006124684-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101086625-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005014744-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005014743-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006316077-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4588304-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2008029834-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8969172-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006016672-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2005007748-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4920252-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003139698-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004096934-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006054353-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6825130-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012060399-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003268356-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016117881-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005007748-A1 |
| priorityDate |
2000-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |