http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1098036-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_325e8f74339359cd24e45eb790ace68f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate | 1996-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a661f757557797656c8ebe635117281 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b47279ee25c03bc7fe11c1d59471401 |
| publicationDate | 1998-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H1098036-A |
| titleOfInvention | Method for forming siliceous pattern |
| abstract | (57) [Problem] To provide a simple method for forming a siliceous pattern. SOLUTION: (A) a step of applying a specific polysilazane or a modified product thereof to a substrate; and (B) a step of coating a predetermined region of the surface of the polysilazane coating film obtained in the step (A) with a hydrophobic material. (C) a step of contacting an amine compound and water with a polysilazane coating film not coated with the hydrophobic material to convert at least a part of the polysilazane to silica; and (D) a step of converting the hydrophobic material and polysilazane under the hydrophobic material. Dissolving and removing the coating film; and, if necessary, (E) A method for forming a siliceous pattern, comprising a step of further oxidizing the coating film containing silica. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005045230-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011054898-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10804095-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I466929-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1463099-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1463099-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006082848-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03056615-A1 |
| priorityDate | 1996-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 102.