| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee1c19da359446fb5c4f0458a57b783d |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09F9-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1343 |
| filingDate |
1996-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc7d56109fb01d655c519a0b91102d33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cddce72409cb61c39362fd2312e459ad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ce85c375771bdf51cb4ed14458ba143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a776b255671d61a2a00e924e8c7b22d0 |
| publicationDate |
1998-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H1091084-A |
| titleOfInvention |
Patterning method of transparent conductive film and substrate with transparent electrode |
| abstract |
[PROBLEMS] To provide a patterning method capable of forming a fine electrode pattern of a low specific resistance transparent conductive film with high accuracy and high yield, and to provide a substrate with a transparent electrode formed by the method. An acid-soluble transparent oxide layer (2, 4) on a substrate (1) is provided. The transparent conductive film formed by laminating the metal layer 3 and the metal layer 3 is etched using an acidic aqueous solution containing halogen ions, and then immersed in an aqueous solution of an alkali metal halide salt. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008066748-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8507303-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006229196-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002299326-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4580331-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006163367-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004172427-A |
| priorityDate |
1996-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |