| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1343 |
| filingDate |
2002-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7c5274f801c407bf0d19dd02db72423 |
| publicationDate |
2004-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2004172427-A |
| titleOfInvention |
Etching solution and etching method |
| abstract |
An etching solution and an etching method for a silver-containing film capable of suppressing side etching and performing pattern processing with high reproducibility and high accuracy are provided. An etching solution for etching a silver-containing film, wherein the etching solution is an aqueous solution containing oxidizing ions and halogen ions, and a resist pattern is used as a mask. An etching method for forming a pattern of a silver-containing film 13 formed on an insulating film 12, wherein the silver-containing film 13 is etched using an aqueous solution containing oxidizing ions and halogen ions as an etching solution 21. An etching method characterized by the following. [Selection diagram] Fig. 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8366958-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006107176-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8821753-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021327926-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020080178-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2020003878-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2020003877-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9365935-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020003878-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020003877-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015072278-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11508762-B2 |
| priorityDate |
2002-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |