http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10326770-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02071 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 1998-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af58a4e48d9386bb9ec0c949a7ed1c7f |
| publicationDate | 1998-12-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H10326770-A |
| titleOfInvention | Method of removing redeposition concealment from etched platinum |
| abstract | (57) Abstract: A method for etching a platinum electrode layer deposited on a substrate is provided. A substrate for supporting a platinum electrode layer, an insulating layer on the platinum electrode layer, and a resist layer on the insulating layer is provided. Portions of the insulating layer are etched and penetrated using an etchant gas plasma. A portion of the insulating layer is removed from the platinum electrode layer, exposing a portion of the platinum electrode layer. The exposed portion of the platinum electrode layer is then etched by using a plasma of an etchant gas containing argon. The etched platinum electrode layer is subsequently over-etched by using a high-density plasma of etchant gas, and the redeposition concealment is removed from the etched platinum electrode layer. Etched platinum electrode layers are used in semiconductor devices. |
| priorityDate | 1997-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.