| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A44D2203-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A42B1-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A42B1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A63H3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A44B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A44B18-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A44B17-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
1997-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_408f1dc0e04ab4efb4d37325c937b69c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66e18570aa6a2e55819b509cf246ee99 |
| publicationDate |
1998-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H10317142-A |
| titleOfInvention |
Cleaning method |
| abstract |
(57) [Problem] To provide a cleaning method capable of efficiently removing a reaction by-product composed of titanium chloride without using plasma. A processing container (4) for forming a film on a substrate (W). In the cleaning method for removing the titanium chloride M adhered to the inside, the titanium chloride is removed using a ClF-based gas as a cleaning gas while the inside of the processing container is heated to 130 ° C. or higher. Thereby, titanium chloride is quickly and efficiently removed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002348670-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100807415-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007533848-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7604042-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7691208-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011236506-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2007026762-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5084508-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007026762-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010059522-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-02095086-A1 |
| priorityDate |
1997-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |